Source: Proceedings.. Conference titles: International Symposium on Microelectronics Technology and Devices - SBMICRO. Unidade: EP
Assunto: PLASMA (MICROELETRÔNICA)
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CIZZOTO, Elias Rodrigues et al. Study of of the influence of the secondary electron emission coefficient in radio-frequency argonplasmas using particle in cell simulation. 2003, Anais.. Pennington: The Electrochemical Society, 2003. . Acesso em: 08 maio 2024.APA
Cizzoto, E. R., Roberto, M., Verdonck, P. B., & Maciel, H. S. (2003). Study of of the influence of the secondary electron emission coefficient in radio-frequency argonplasmas using particle in cell simulation. In Proceedings.. Pennington: The Electrochemical Society.NLM
Cizzoto ER, Roberto M, Verdonck PB, Maciel HS. Study of of the influence of the secondary electron emission coefficient in radio-frequency argonplasmas using particle in cell simulation. Proceedings. 2003 ;[citado 2024 maio 08 ]Vancouver
Cizzoto ER, Roberto M, Verdonck PB, Maciel HS. Study of of the influence of the secondary electron emission coefficient in radio-frequency argonplasmas using particle in cell simulation. Proceedings. 2003 ;[citado 2024 maio 08 ]
